PRODUCT

Cuprum promise to always do our best.

Ru electroplating for next generation semiconductor metallization.

Our Ru electroplating solution is designed for next-generation semiconductor metallization. 

It provides uniform ruthenium deposition, excellent electrical performance, and high process reliability for advanced semiconductor manufacturing.


Key Features

✔ Uniform Ru Deposition

✔ Excellent Adhesion

✔ Superior Corrosion Resistance

✔ High Electrical Conductivity

✔ Low Surface Roughness

✔ High Process Stability

✔ Compatible with Advanced Packaging

Comparison of trench cross-sections : Conventional technology

(using ruthenium sulfate, sulfamic acid, and thio compounds) Vs Cuprum ruthenium plating solution.

Optical images show that the proposed film has flawless quality without any surface cracks or pits compared to conventional methods.

SEM cross-sections verify that the proposed solution perfectly fills nano trenches without internal voids or seams.