PRODUCT

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 Cu Electroplating solution for Advanced TGV Filling

 Our Cu electroplating solution is optimized for high-aspect-ratio Through Glass Via (TGV) filling.

It enables excellent bottom-up deposition, minimizes void formation, and improves process reliability for advanced semiconductor packaging.

  Key Features

✔ Void-free Filling

✔ High Aspect Ratio

✔ Excellent Throwing Power

✔ Low Overburden

✔ High Bath Stability

Selectivity of Copper Electroplating

The normal process causes excessive top copper overburden (73 µm), which leads to over plating and high CMP load.

The Cuprum B process increases selectivity, reducing the top layer to 33 µm while keeping the via fully filled.

TGV electroplatingAR 8:1 (Only DC plating)


NoneJGBCuprum
Additive
Filling Ratio(%)626886

The Cuprum additive exhibits a higher filling ratio than JGB

Deep via filling enabled by the interaction of the Cuprum additive